Please use this identifier to cite or link to this item: http://hdl.handle.net/10497/1598
Title: Optical emission spectroscopy study of low frequency inductively coupled plasmas : application to plasma processing
Authors: Azam, A. B. M. Shafiul
Issue Date: 2000
URI: http://hdl.handle.net/10497/1598
Issued Date: 2000
Call Number: QD96.I47 Aza
Appears in Collections:Doctor of Philosophy (Ph.D.)

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