Please use this identifier to cite or link to this item: http://hdl.handle.net/10497/1622
Title: 
Development and investigation of a high density, inductively coupled plasma source
Authors: 
Issue Date: 
2001
URI: 
Issued Date: 
2001
Call Number: 
QC718.4 Tsa
Appears in Collections:Doctor of Philosophy (Ph.D.)

Files in This Item:
File Description SizeFormat 
TsakadzeErekle-PHD.htmlAbstract8.21 kBHTMLView/Open
TsakadzeErekle-PHD.pdfFull Text6.74 MBAdobe PDFView/Open
Show full item record

Page view(s)

28
checked on Feb 20, 2019

Download(s)

6
checked on Feb 20, 2019