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Crystallization of an amorphous lead zirconate titanate thin film with a dense-plasma-focus device
Citation
Rawat, R. S., Srivastava, M. P., Tandon, S., & Mansingh, A. (1993). Crystallization of an amorphous lead zirconate titanate thin film with a dense-plasma-focus device. Physical Review B, 47(9), 4858-4864. https://doi.org/10.1103/PhysRevB.47.4858
Abstract
The pulsed ion beam of highly energetic argon ions that is generated during the focus phase of the dense-plasma-focus (DPF) device is used to crystallize the as-grown rf-sputtered amorphous thin film of lead zirconate titanate (PZT). Many samples of PZT thin films of different thicknesses are exposed to the
DPF device. The 0.9-pm-thick PZT thin film is crystallized to the desired rhombohedral phase. The scanning electron microscopy photograph of this film indicates a reasonably good surface quality.
Date Issued
1993
DOI
10.1103/PhysRevB.47.4858