Please use this identifier to cite or link to this item: http://hdl.handle.net/10497/2379
Title: 
Optical emission spectroscopy study of precursors in ICP assisted DC magnetron sputtering deposition of TiN
Authors: 
Issue Date: 
2001
URI: 
Issued Date: 
2001
Call Number: 
TK7871.15.F5 Cha
Appears in Collections:Bachelor of Science

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