Please use this identifier to cite or link to this item: http://hdl.handle.net/10497/2379
Title: Optical emission spectroscopy study of precursors in ICP assisted DC magnetron sputtering deposition of TiN
Authors: Chan, Marvin Weng Yew
Issue Date: 2001
URI: http://hdl.handle.net/10497/2379
Issued Date: 2001
Call Number: TK7871.15.F5 Cha
Appears in Collections:Bachelor of Science

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