Please use this identifier to cite or link to this item: http://hdl.handle.net/10497/2612
Title: Preparation and property investigation of silicon carbide thin films synthesized by RF plasmas
Authors: Cheng, Qijin
Issue Date: 2008
URI: http://hdl.handle.net/10497/2612
Issued Date: 2008
Call Number: TK7871.15.S56 Che
Appears in Collections:Doctor of Philosophy (Ph.D.)

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